Products
Ceramics / Consumables
S & D Materials supplies spare parts and consumable items made from a set of materials grouped as ‘ceramics’ for semiconductor manufacturing equipment from many OEMs used in all process areas. Both OEM original and approved second source parts are available in new, pre-owned and refurbished conditions, and we access real time inventory data within a worldwide network of part providers in addition to our in-house inventory.
MATERIALS |
PARTS |
PROCESS AREAS |
OEMS |
---|
Fused quartz
Synthetic sapphire
Silicon carbide (SiC)
Silicon Ceramic
Alumina |
Hot edge ring, retaining ring, focus ring, electrode, showerhead, nozzle, lamp tray, window, viewport, cover, collar, tray, boat, end effector |
ALD, CVD, Diffusion, Etch, Ion implant, PVD, Sputter |
AMAT, Axcelis, ASTeX, Gasonics, LAM Research, Mattson, Novellus, Matrix, Oerlikon, Ulvac, Varian |
Critical Items
When circumstances force a critical tool offline, the urgency to obtain a needed part increases rapidly with every hour production is lost. S & D employs creative methods to get you the item you need faster – queue management, stock swaps, buffer stock, consignment stock – and we will exhaust every available option to improve delivery.
PRODUCT GROUP |
SPECIAL SERVICES |
---|
Ceramics consumables
Heater blocks, pedestal, ESCs
Bellows, Chillers
Assemblies, Kits |
- TOOL DOWN™ Worldwide Expedite service
- Real Time availability data in 500+ warehouses
- Customer-specific Buffer Stock
- On Site Consignment Programs available
|
International Supply Chain Management
When the ideal product or service for your situation resides with a new or unknown supplier, particularly an international one, the transaction can bring some risk, a cash flow impact, warranty agreement and possibly other issues. S & D has developed the experience and an international network of trading partners to enable us to offer individual transaction management or long term supply chain support in these situations.
SERVICE |
DESCRIPTION |
---|
Overseas sourcing: |
Secure, trusted access to hundreds of low priced overseas suppliers |
QA Quality Assurance: |
Quality gatekeeper; ensure accuracy, form, fit and function of all items |
Transaction guarantee: |
Responsible for satisfactory delivery of goods or services |
Transaction financing: |
Eliminate, absorb or neutralize prepayment requirements |
Issue management: |
Work on customers behalf to resolve any issues during or after transaction |
Warranty enforcement: |
Manage any warranty issues to final satisfactory resolution |
Services
AX7610 Plasma Applicator
S & D Materials provides refurbishment for the MKS/ASTeX AX7610 family of plasma applicators with new sapphire and quartz tubes. We replace tubes with a new sapphire or quartz tube, or we can provide the entire plasma applicator of tube inside a copper cooling coil.
Sapphire Discharge Tube
- New applicators available with new copper cooling coil
- Standard & extra long tubes
Quartz Discharge Tube
- Non-fluorine based gases
- Standard & extra long tubes
OEMS
AMAT, Axcelis, ASTeX, LAM, Novellus, Ulvac, Varian
*New Applicators Available*
Ferrofluid Seal Sales & Repair
S & D Materials sells, repairs and overhauls spindles, feedthroughs, rotary gas unions in semiconductor tools from TEL, Varian, AMAT, Novellus & Axcelis for Diffusion, Ion Implantation & CVD. We also repair and rebuild custom ferrofluid seals from Ferrotec, Rigaku, EKK and others.
MODEL |
PROCESS AREA |
NEW |
REPAIR |
SWAP |
---|
TEL 8", 12"
TEL 12" |
DIFFUSION |
X
X |
X
X |
X |
VARIAN Vision 80 8" RMS
VARIAN 8" 3180, 3290
AXCELIS HE 3 |
IMPLANTATION |
X |
X
X
X |
|
NOVELLUS Concept 2
NOVELLUS Concept 3 VECTOR |
CVD |
X |
X
X
X |
|
More models available - click here.
Cleaning & Resurfacing
As part of our core value proposition of keeping our customers' manufacturing equipment functioning at peak performance for as long as possible, we also clean and resurface parts and components from multiple process areas. We manage the process from end to end, guaranteeing the fastest turnaround time at the lowest prices possible.
SERVICE |
DESCRIPTION |
---|
Atomic Level Cleaning |
Safe deposition removal and surface treatment on parts subject to damage from traditional abrasive-type cleaning; 'Dry Ice Blasting' available for some items |
InSitu Deposition Inhibition |
Cleaning technology with defect reduction built into the process; final surface contamination controlled |
Performance Coatings |
Coatings include: Yttria oxide, zirconium oxide, composite TWAS, adhesion coating for multi-layer solutions, plasma coating for quartz, CTE-matching TWAS coatings |